Nick Strandwitz, professor of materials science and engineering, and graduate student Ling Ju had their research published as part of an “emerging investigators” themed collection from the Journal of Materials Chemistry C: Materials for optical, magnetic and electronic devices.
The paper, Cyclic azasilanes as volatile and reactive precursors for atomic layer deposition of silicon dioxide, is part of the journal’s series Emerging Investigators 2016: Novel design strategies for new functional materials. The series highlights rising stars of materials chemistry research, gathering the best work from materials chemists in the early stages of their careers. Each contributor to the series was recommended by the journal’s editorial board as carrying out work with the potential to influence future directions in materials chemistry.
The research involved using a suite of four volatile aminosilanes — cyclic azasilanes — to deposit silicon dioxide (SiO2) films by atomic layer deposition (ALD) over the temperature range 100–300 °C by reaction with O3.